|
|
 |
|
Manual
Defect
Classification |
Automated
Defect Classification |
Single
Blind
Contact |
Cluster
Blind
Contact |
Particle |
Contact
Residue |
Unknown |
Accuracy
(%) |
| Single
blind contact |
16
|
0 |
1
|
0
|
0 |
94.1
|
| Cluster
blind contact |
1
|
8 |
0
|
0
|
0 |
88.9
|
| Particle |
2
|
1 |
23
|
0
|
2 |
82.1
|
| Contact
residue |
1
|
0 |
0
|
371
|
0 |
99.7
|
| Unknown |
0
|
0
|
0
|
0
|
0 |
0
|
| Purity
(%) |
80.0
|
88.9 |
95.8
|
100.0
|
0 |
Avg.
accuracy = 98.1%
Avg. purity = 98.6% |
|
| Table I: Accuracy and purity of a typical
set of automated defect classification results. |
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© 2007 Tom Cheyney
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