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INDUSTRY NEWS
Applied
Materials makes first diagonal X architecture test IC, consortium
reports
Applied
Materials has manufactured the first 90-nm test chip using a unique diagonal
interconnect design, reports the consortium that is developing the technology.
The process equipment manufacturer produced the test chip with X architecture
at its Maydan Technology Center in Sunnyvale, CA, according to the X Initiative.
The group of semiconductor manufacturers and suppliers was established to
facilitate the development of X architecture's diagonal interconnect concept.
Applied
used the interconnect technology to make a multilayer copper/ low-k
interconnect chip on 300-mm wafers. The successful process proves
that the concept can be used with existing chipmaking methods, the
consortium says. Applied says it used its wafer inspection and metrology
tools to validate CD and defect levels.
"The
results of this test chip demonstrate that the design rules for
X architecture designs can be comparable to those of 'Manhattan'
designs, which will accelerate the adoption of the architecture
as a production-design option," says Jan Willis, steering group
facilitator for the X Initiative and vice president of strategic
third-party programs for Cadence Design Systems.
Cadence
is a member of a consortium that encompasses companies from silicon suppliers
to design firms. The membership list includes ASML, DuPont Photomasks, JEOL,
KLA-Tencor, Nikon, PDF Solutions, STMicroelectronics, and Zygo.
X
architecture rotates the main direction of the interconnects in the fourth
and fifth metal layers by 45 degrees in relation to the traditional street-grid
Manhattan design. This approach reduces total wiring on a device by more
than 20% and via counts by more than 30%, according to the initiative's
backers. The consortium has a five-year plan to publicize and support
development of the architecture as well as to track its level of usage
throughout the industry's supply chain. Information: www.xinitiative.org.

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