INDUSTRY NEWS

Expansions and Acquisitions

Applied buys Boxer Cross

Applied Materials has purchased Boxer Cross, a Silicon Valley–based supplier of in-line monitoring equipment, foran undisclosed sum. The world's largest manufacturer of semiconductor equipment acquired all of the outstanding stock of the six-year-old company, which will become part of Applied's process diagnostic and control unit. Boxer Cross makes the BX-10 source/drain and ultrashallow-junction measurement system, the BX-30 advanced interconnect measurement tool, and related gear. The in-line electrical measurement systems detect critical variations in implant/anneal and dual-damascene copper processes on 200- and 300-mm wafers. Applied's goal is to integrate Boxer Cross metrology capabilities into process tools in order to reduce cycle times for semiconductor customers.

Vendors team on tests

Keithley Instruments and Novellus Systems are working together to develop diagnostic tests for copper and low-k integration. The electrical process tests will be based on Keithley's S600 automatic CD parametric platform. The goal of the collaboration is to reduce the development time in copper processes and improve yields for customers of both firms. Work will take place at Novellus' customer integration center in San Jose. Cleveland-based Keithley specializes in optical and electrical measurement tools. Novellus manufactures deposition, surface preparation, and CMP equipment.

"The industry's move to copper and low-k materials presents new and significant measurement challenges during process development, process integration, and process control in volume production," says Mark Hoersten, Keithley's general manager. Novellus says the collaboration will improve its ability to characterize the electrical performance of copper and low-k interconnect structures.

Swagelok forms semi unit

Swagelok, a manufacturer of components for gas and fluid systems, has launched a services company based in Silicon Valley. Swagelok Semiconductor Services was established to give the Ohio-based supplier better access to equipment manufacturers that use the company's components. Philip Roberts, formerly of Praxair, was named president of the unit, which is headquartered in Santa Clara, CA. As part of the expansion plans, Swagelok also enlarged its staff of field engineers and added product development personnel. The parent firm will keep its manufacturing operations in the Cleveland area.

Disposables vendor debuts

A veteran of nearly 20 years in the cleanroom industry has launched a company specializing in contamination control products. Dennis Baldwin has established Purus International in Indio, CA, as a supplier of mats and other disposable products. Baldwin is the former general manager of ITW Alma of Palm Springs, CA. Information: www.purusint.com.

Newport improves test lab

Newport of Irvine, CA, has renovated its test and metrology lab for motion control products. The improvements include environmental controls and advanced test equipment from Zygo. The company says it has paid particular attention to reducing background noise and vibration in the lab because of their effect on test results. Newport also instituted a procedure based on ASME B5.57, ASME B554, and ISO 230-2 to ensure consistent test results and analysis. The company's products include submicron positioning systems, vibration isolation equipment, and precision robotics.