Partners add three gases

Touting the safety and productivity benefits, ATMI and Matheson Tri-Gas have added three products to their jointly marketed line of specialty gases. The gases are phosphorus fluoride, arsenic pentafluoride, and hydrogen selenide. The additions bring the suppliers' suite of subatmospheric materials for ion implantation to eight gases. ATMI says the special materials in its subatmospheric technology bind to specific gas molecules. The technology converts high-pressure toxic gases into so-called no-pressure materials for high productivity and enhanced tool performance.

Matheson Tri-Gas is ATMI's partner for production distribution of the SDS Gas Source, an alternative that ATMI developed for high-pressure gas cylinders. The product provides chipmakers with a safer gas supply for ion implantation than the supply provided by high-pressure cylinders, according to ATMI. The company claims the fluorinated dopants double or triple the operating life of ion sources and prevent heavy deposits in the ion source.

In related news, Danbury, CT­based ATMI purchased Microbar's copper-delivery product line. Microbar's Copper 2.0 chemical-management system combines delivery and recovery of high-purity chemicals to copper deposition systems. The tools are made of reinforced polypropylene and contain PFA or PVDF wetted components. The acquisition complements ATMI's CuChem copper-bath analysis system, the company says.

Edlon buys Mattson plant

Edlon, a Pennsylvania-based manufacturer of fluoropolymer-lined vessels, has bought a 30,000-sq-ft plant from Mattson Technology for an undisclosed sum. Located in West Chester, PA, the facility will be used to make Edlon's Secure and Pure products. The plant houses two Class 100 cleanrooms, DI water system, and an applications lab. The factory, which also houses a computer-controlled machining center, is set up for rotomolding of fluoropolymer components, Edlon says.

Eskay changes its name

The North American arm of Daifuku has changed its name to reflect its presence in the worldwide market for materials-handling equipment. The subsidiary announced the name change to SK Daifuku in August when it opened a 75,000-sq-ft headquarters in Salt Lake City. The change took effect October 1. Based in Osaka, Japan, Daifuku is the third-largest materials-handling company in the world. Eskay is a phonetic adaptation of two Japanese words, shiso and kakumei, and means a conceptual business revolution, according to the company. Daifuku's clean factory automation division merged with Eskay in 2000. Tim Inoue, chairman of Eskay, says the name change will clear up confusion caused by operating under one name in the United States and another name in a different market.

Wiper center will be a 'first'

Milliken & Co. claims its Class 1 research and technology center under construction will be the first of its kind for final processing of cleanroom wipers and mops. Called the Anticon Technology Center, the facility in Union, SC, is near Milliken Research. Completion is scheduled for the end of 2002. The center, which will house advanced analytical equipment, will make Milliken "the only truly vertical wiper supplier to the cleanroom wiper market, from fabric formation through final processing," says Chris Roman, business manager.

Tegal buys sputter firm

Tegal has purchased a manufacturer of sputtering equipment for approximately one-half million shares of common stock and a portion of future earnings. With the acquisition of Sputtered Films, Tegal adds deposition equipment to its line of etch systems. The purchase includes the Endeavor family of thin-film deposition tools. Sputtered Films makes sputtering equipment for semiconductor, photomask, compound semiconductor, and packaging use. Sputtered will continue to operate from its headquarters in Santa Barbara, CA. The company was founded more than 35 years ago by Peter Clarke, who invented the first magnetron sputtering device, according to Tegal.

'Lab-to-fab' merger debuts

Two companies specializing in analytical technology have merged to offer what one executive calls "lab-to-fab" services. Physical Electronics and Evans Analytical Group have formed PHI-Evans. The new company combines the former firm's materials analysis instruments and the latter's materials characterization lab capabilities. The merger "will benefit the semiconductor industry by coordinating our well-respected R&D services through every stage in the process life cycle," asserts Dave Ring, president and CEO of Minneapolis-based PHI-Evans.

Cleanpak buys Servicor

Cleanpak International (CPI) has purchased Servicor, a manufacturer of modular cleanrooms and related equipment, for an undisclosed sum. The acquisition makes Servicor of San Carlos, CA, a division of CPI, which is based in Clackamas, OR. CPI will sell Servicor's products under the Servicor CPI name. The Oregon firm makes customized air-handling equipment, fan filter units, and ceilings.