Two vendors have teamed to develop postetch cleaning for advanced processes using low-k materials and copper. Semitool plans to work with the electronic chemicals division of Ashland Specialty Chemical on the project. Semitool, a manufacturer of single- and multi-wafer-batch wet-chemical tools, says it hopes to improve tool performance and reduce cost of ownership. Ashland sells ACT AS-65 etch-residue remover. Formulated for use with submicron technology, the material is compatible with low-k and copper processes. The chemical contains an amine that is particularly effective in removing etch residue with high inorganic content, Ashland says. Semitool's batch spray systems handle up to 50 wafers per load.

Rudolph eyes detection spin-off

Rudolph Technologies is looking to broaden its metrology product line by acquiring a Texas firm specializing in detection of "macro-scale" wafer defects. The New Jersey–based company has agreed to pay approximately $27.5 million for ISOA. Based in Richardson, TX, ISOA makes wafer inspection systems that detect the sources of macro-scale defects after photoresist coating, photolithography, and related process steps are completed. ISOA is a spin-off of Texas Tech University's International Center for Informatics Research. The firm says its new WaferView automated tool line classifies defects in real time at high throughputs, enabling chipmakers to improve yield and decrease inspection costs. Rudolph believes the acquisition complements its metrology offerings, which include laser spectroscopic ellipsometry and picosecond ultrasonic laser sonar metal film metrology.

DuPont wants ChemFirst

DuPont has signed an agreement to buy ChemFirst for approximately $408 million in cash. The supplier of electronic chemicals and materials reported 2001 sales of $278 million. ChemFirst employs approximately 480 at four plants in the United States and its operations in Scotland and Japan. DuPont says the purchase strengthens its foothold in the semiconductor materials market, where the company wants to become a leading supplier. The ChemFirst electronic materials business, including EKC Technology, will become part of DuPont Electronic Technologies. Final signing is expected to take place in the fourth quarter of 2002.