MICRO:The big payback

Robert Helms (right), CEO of International Sematech, receives a royalty check from Ken Schroeder, president and CEO of KLA-Tencor, during the San Francisco portion of Semicon West. Presented at KLA-Tencor's annual Yield Management Seminar in July, the $409,728 check is the first in a series of payments from the supplier for Sematech's role in developing the TeraStar system. The reticle inspection platform for the 100-nm technology node is one of the most successful launches in the company's history. Begun six years ago, the Sematech program included the first contract provision allowing the consortium to recoup development costs. That contract became a model for future contracts, the supplier says.

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