September
18–20, Integrated Nanosystems 2002; Berkeley, CA. Contact:
www.asme.org/nano; 973/882-1717
(fax).
September
22–27, IEEE International Conference on Ion Implantation
Technology; Taos, NM. Contact: 732/562-3878; www.iit2002.com.
September
23–25, Microelectronics Materials Strategy Symposium; San
Jose. Contact: 408/943-6981; nstewart@semi.org
September
23–27, VLSI Multilevel Interconnect Conference (VMIC);
Santa Clara, CA. Contact: 818/978-3552.
October
1–2, OEM New England; Worcester, MA. Contact: 310/445-4200;
www.devicelink.com/expo.
October
1–4, Annual BACUS Symposium on Photomask Technology; Monterey,
CA. Contact: 360/676-3290; info-bacus@spie.org.
October
6–10, EOS/ESD Symposium; Charlotte, NC. Contact: 315/339-6937;
info@esda.org.
October
14–17, Microprocessor Forum 2002; San Jose. Contact:
800/527-0288.
October
15–16, Semicon Southwest; Austin, TX. Contact: www.semi.org
(expositions).
October
15–17, International Symposium on Semiconductor Manufacturing;
Tokyo. Contact: issm@riz.co.jp.
October
21, Copper Interconnect Process Technology Course; Redwood
City, CA. Contact: 510/642-4111; www.unex.Berkeley.edu/enroll.
October
21–23, GaAs IC Symposium; Monterey, CA. Contact: 800/810-4333;
m.e.clemente@ieee.org.
October
28–November 1, Photonics Fabrication Europe; Brugge,
Belgium. Contact: 360/676-3290; spie@spie.org.
November
3–7, International Symposium for Testing and Failure Analysis;
Phoenix. Contact: 440/338-5151; cdec@asminternational.org.
November
4–6, Cleanrooms West; 603/891-9267; atdregistration@pennwell.com.
November
4–8, American Vacuum Society International Symposium; Denver.
Contact: 212/248-0200; avsnyc@avs.org.
November
11–13, Compound Semiconductor Manufacturing Expo (CS-MAX);
San Jose. Contact: 516/576-2440; rfinneg@aip.org.
November
12–13, Surface Cleaning Workshop; Boston. Contact:
617/373-2992; Busnaina@coe.neu.edu.
November
12–15, Electronica 2002; Munich. Contact: +49 89 949
200332; +49 89 949 20319 (fax); Mudhenk@messe-muenchen.de.
November
18–20, Plasma Etching and Reactive Ion Etching Course;
Burlingame, CA. Contact: 510/642-4111; www.unex.berkeley.edu/enroll.
November
18–19, Capitalizing on Digital Construction Conference;
Phoenix. Contact: 480/965-9282.
November
20–21, Rockwell Automation Fair; Anaheim, CA. Contact:
612/455-1700; ekeiser@psbpr.com.
November
21–22, Reliability and Process Control for Advanced Processes
Course; Redwood City, CA. Contact: 510/642-4111; www.unex.berkeley.edu/enroll.
December
2–5, Army Science Conference; Orlando, FL. Contact:
www.asc2002.com.
December
2–6, MRS Fall Meeting; Boston. Contact: 724/779-3003;
info@mrs.org.
