Range
Ion Level (atoms/cm2)
Sodium
Potassium
Calcium
Fluoride
Chloride
Sulfate
Phosphate
Nitrate
High
<2 x 1013
<2.1 x 1013
1 x 1014
2 x 1013
13 x 1013
<5 x 1012
<7 x 1012
<10 x 1012
Average
<1 x 1013
<1 x 1013
5 x 1013
1 x 1013
8 x 1012
<3 x 1012
<5 x 1012
<7 x 1013
Low
<4 x1012
<4 x 1012
1 x 1013
<3 x 1012
<3 x 1012
<1 x 1012
<1 x 1012
<2 x 1012
Table V: Ionic cleanliness of nine recleaned OEM parts.