Product Extra!

A new software program allows operators to control Atomika's SIMS 4600 mass spectrometry system from a remote computer. Using the vendor's Remote System Manager software, a lab or fab manager can monitor the progress of ultrashallow depth profiling of wafers and analyze the data from the office. The SIMS 4600 offers the ability to ensure tool matching and implant dose uniformity on wafers up to 300 mm. The instrument provides depth-profiling analysis on 50 different samples or on a fully loaded cassette. Information: http://www.atomika.com.

Work beginning at an applications center with SEZ's spin-process equipment will enable the supplier to offer wafer decontamination and yield improvement to firms developing copper and low-k products. The center will use SEZ's 200-mm Model 203 and 300-mm Model 304 model spin processors to perform copper decontamination and prelithography cleans for clients using copper and low-k dielectric processes. The two models are able to use up to three different chemical solutions in a programmable sequence and single process cycle. The sequence includes a DI water rinse and N₂ drying. Chemical solutions can be recycled, heated, and filtered within the system, or used in a single-pass mode. End-point control, ozone processing, and robotic handling are available options. Information: http://www.sez. com.

Purelock compression fittings from NewAge Industries feature a new design that facilitates disconnection and reuse. The fittings are precision molded from chemically inert PFA. They match to form a contamination-free system for fluid applications. Each fitting consists of a body, nut, ferrule, and gripper. Made of carbon-filled Tefzel, the black gripper can be seen through the other three translucent parts in order to assure the user that the fitting is installed properly. The new textured surface of the nut makes it suitable for hand tightening. Styles include elbows, tees, adapters, connectors, and bulkhead unions. Sizes range from 1/8 to 3/4 in. tube. Information: http://www.newageind.com.

Micron Training International has upgraded most of the video training programs in the company's good manufacturing practice (GMP) and contamination control series. The programs are digitally remastered and restructured into parts, with new graphics and presentations. Customers may exchange their original videotape by returning the copy to the service center where it was purchased for a 50% discount on the price of the upgraded version. Information: http://www.mvitraining.com.

MKS Instruments has published an expanded brochure on its HPS Series 953 Pirani and cold-cathode gauge controller. The six-page publication features a comprehensive description, specifications, suggested applications, dimensions, and prices. The Series 953 components provide vacuum measurement from 10^–9 torr to atmosphere. The 953 controller operates one HPS Pirani sensor and one HPS cold-cathode sensor. Information: http://www.mksinst.com.

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