Spin Processor

SEZ

Villach, Austria

A noncontact, single-wafer, double-sided cleaner satisfies the demands of next-generation technology nodes. The 8200 spin processor has a throughput of 200 wafers per hour, providing an alternative to conventional cleaning technologies. The four-chamber tool is based on the 4200 Spin-Processor, with an added double-sided cleaning system. Prediffusion cleans can be performed with less chemistry and improved end uniformity with the double-sided system. Because the wafers remain untouched during transport, redeposition and cross-contamination are eliminated. Compared with other single-wafer tools, the 8200 offers high wafer-to-wafer repeatability for cleaning applications.

Thin-Film-on-Quartz Heater

Trebor

West Jordan, UT

The Quantum thin-film-on-quartz ultrapure resistive heater offers a flow path made of GE214 semiconductor-grade quartz, PTFE, and PFA with no contamination risk. The unit can respond rapidly to changes in flow or temperature set point and features steady-state control within ±1°C. No external element cooling is required. It also offers faster response and better process control than immersion-style heaters.

Metal Etch Trap

MKS Instruments

Andover, MA

The HPS metal etch trap removes by-products from metal etch lines before they reach a dry pump, without decreasing pump speed. Condensable effluents generated by aluminum etch processes are collected by the trap at a rapid rate. Maintaining the trap involves replacing a single disposable trapping element, rather than cleaning several feet of vacuum line. The trap's efficiency eliminates the need to run heated lines to the scrubber, lowering the cost of ownership.

Deep-UV Laser Ablation System

New Wave Research

Fremont, CA

A deep-UV laser ablation system improves the ablation of all inductively coupled plasma optical emission spectroscopy (ICP-OES) and inductively coupled plasma mass spectroscopy (ICP-MS) materials. The UP-213 produces a fine-particle distribution that increases the transport efficiency of the aerosol. The system's deep-UV functioning results in boosted sensitivities and fewer deposits at the plasma. When used as a thin-film analysis tool, the instrument provides depth profiling and spot sizes to 5 µm. A high-magnification video system with computer-controlled zoom and a quick-change sample cell holder made to accept standard 1-in.-diam slugs and thin sections are part of the system's standard configuration. In addition to its use with any ICP, the tool can be used with a noble gas or stable isotope mass spectrometer for solid sampling of semiconductor and other specimens.

Specialty-Gas Heating System

Accurate Gas Control Systems

Soquel, CA

A high-powered heating system maintains constant cylinder vapor pressure required for removing specialty gases safely from large-capacity containers. The MegaFlow generates up to 9 kW of power, delivering the amount of heat to the gas system that is necessary to counterbalance heat loss through evaporative cooling and gas delivery. The system is designed for use on containers such as tonners or Y-cylinder vessels that store ammonia, nitrous oxide, sulfur dioxide, hydrogen chloride, chlorine, and other specialty gases with 99.999 % minimum purity.

Ultrapure Water System

Xzero

Stockholm, Sweden

An ultrapure water system uses a membrane distillation method to remove common contaminants from water. The Xzero AB uses the same polymer membrane found in Gore-Tex to block pollutants. The system works by heating the water to the point of evaporation, at which time it passes through the polymer membrane and condenses on the other side. The dissolved pollutants remain trapped on the heated side of the membrane. Harmful contaminants such as silica and total organic carbon can be eliminated.

300-mm Wafer-Handling System

PRI Automation

Billerica, MA

A unified material-handling system provides fabwide tool-to-tool transport of 300-mm wafers. The system increases the speed and efficiency of wafer delivery by combining interbay and intrabay transport into one solution. TransFab allows semiconductor manufacturers to customize their wafer-handling system with flexible configurations. While the fully unified approach optimizes resource sharing, system flexibility, and hot-lot delivery, the partially unified approach allows incremental implementation of automated material handling with some direct tool-to-tool delivery and resource sharing. Implementation options available to customers include fully unified and partially unified configurations.

Deep-UV Spectrophotometer

Acton Research

Acton, MA

A deep-UV spectrophotometer has been designed specifically for operation in a nitrogen-purged environment. The nitrogen purge compatibility of the Purged CAMS eliminates the costs of vacuum-system operation and reduces contamination caused by test materials outgassing under vacuum. The CAMS characterizes pellicles, reticle blanks, lens materials, silicon wafers, and optical coatings for reflectance and transmission measurements ranging from 120 to 250 nm. Handling of the components and instrument downtime is minimized through automated multiple sample selection or x-y translation.

Fabwide Monitoring System

BOC Edwards

Wilmington, MA

A comprehensive, fabwide monitoring system allows monitoring of up to 1000 dry-pump and exhaust gas management systems. The FabWorks 32 is a field-proven network system that provides on-line status reporting and immediate alarm response. Other features include data logging, paging, and remote support. The system also has 50 networks worldwide.

Small-Valve System

Parker Hannifin Pneutronics Div.

Hollis, NH

The world's smallest valve gives a new manifold the capabilities of much larger systems, with the advantage of a significantly smaller package size. The new X-System utilizes the 8-mm digital X-Valve, which incorporates all functional features in a glass-reinforced PBT-molded unitized body. The valve has a lightweight, snap-together assembly with short lead times, making it more cost-effective and efficient than traditional valve manifolds made of heavy metal or plastic. Tolerance problems and potential leak points are minimized by an elastomer base for screwless assembly and fewer functional parts.

Compact Process Controller

Watlow Electric Manufacturing

St. Louis, MO

A compact process controller provides users with the option to add logic programs adhering to their specific needs. The CPC400 contains four to eight control loops in the same amount of front-panel space as that of a single-loop controller. This feature eradicates the need for systems requiring both closed-loop and sequential control. The instrument supports thermocouples, resistance temperature detectors, linear voltage, current, and frequency. A built-in communication port allows designers to interface additional controllers to a host computer for operator controls and data acquisition. A diagnostic feature automatically detects sensor failures. Other features include PID, cascade, and ratio and differential control strategies.

Electroplating Monitor

ECI Technology

East Rutherford, NJ

The Qualilab QL-5 analyzer accurately monitors organics, inorganics, and contaminants in the electroplating process. The instrument calculates the concentration of additives and their components in a copper or other electroplating bath, displaying live voltammograms (fingerprints) of contaminant buildup. An automated, user-friendly feature is included in the instrument to facilitate hassle-free navigation through the analysis process. The QL-5, which replaces the QP-4000, is supplied with a PC, monitor, and printer.

Corrosive-Liquid Flow Sensors

McMillan

Georgetown, TX

A series of sensors can measure flow rates from 15 ml/min to 50 L/min with a ±1% accuracy and an approximate response time of 1 second. Series 106 flow sensors are used primarily in semiconductor liquid-flow applications, in which particle-free operation and high purity are essential. The components measure deionized water and most corrosive liquids accurately. The series is expected to replace conventional glass-tube and ballflow meters in many applications because of its Teflon and sapphire wetted surfaces. In addition, the flow sensors have low power requirements, standard opto-isolated pulse output, and a fast-response micro-Pelton wheel that determines the liquid flow rate.

High-Precision Tubing Pumps

Micropump

Vancouver, WA

Ismatec-series multichannelled tubing pumps feature up to 40 channels, interchangeable pump heads and tube beds, and flow rates from 0.001 ml/min to 13 L/min. The pumps are chemical-resistant and contamination-free. Their rugged stainless-steel construction makes them suitable in processing, scientific R&D, and various high-precision applications.

Defect Inspection Tool

FEI

Hillsboro, OR

The fully automated Expida dual-beam structural diagnostics tool performs in-fab characterization and analysis of process excursions and defects. The instrument can be reconfigured from 200- to 300-mm wafer manufacturing with minimal interruption. The tool allows users to cut, view, measure, analyze, and modify the structures of ICs during all aspects of manufacturing.

Pressure Transducers

Sensortechnics

Dublin, CA

Pressure ranges from 700 to 5000 psi are achieved by a new line of pressure transducers. The CTU9000HP piezoresistive transducers offer long-term stability and linearity for aggressive media. The series has an output signal of 4–20 mA and a stainless-steel housing measuring 0.86 in. diam. The transducers also include an all-welded stainless-steel diaphragm for all media compatible with SS 303. Custom designs and a wide range of fittings are available, making the components compatible with a range of OEM products.

Metal-Sealed Flange

Atlas Technologies

Port Townsend, WA

Metal-sealed flanges reduce pump downtime and eliminate O-ring contamination. The Atlas rectangular flange has a stainless-steel sealing surface, allowing process pressures to be reached at a fast and efficient rate. All rectangular ultrahigh-vacuum flanges are made with either stainless-steel knife edges or stainless faces for crushable VAT gaskets. CF flanges are built in all sizes to accommodate other ports on process tools. The flanges comply with SEMI standards.

ESD-Safe Lighting

StockerYale

Salem, NH

The demands of static-sensitive applications can be met with ESD-safe fiber-optic goosenecks and ringlights for use with ESD-safe fiber-optic illuminators. The goosenecks are available in single- or dual-positioned models, are 0.19 in. in diam, and use high-output 0.66 NA glass fiber. These shadow-free accessories are suitable for microscopy and machine-vision applications such as test and measurement and character verification. The ringlights and goosenecks can be modified to meet exact specifications or custom-designed with stainless steel, aluminum, brass, or plastic end-tip terminations.

Ultrasonic Sensors

Scientific Technologies

Logan, UT

A high-precision, low-cost ultrasonic sensor can be used for tank or bin conrol, as well as for automating industrial processes and tools. The sensor uses microprocessor intelligence to filter the return signal and discriminate the desired target from unwanted false echoes and ambient noise. The units offer good temperature characteristics, programmable filtering, and pulse-width digital output for remote display. Other features include analog output, RS-485 output, programmable trip-point solid-state relay, and RS-232 communications via an RST-2001 programming module. The sensors can be programmed via a personal computer or Palm operating system.

Wafer-Handling Tweezers

NetMotion

Fremont, CA

Nonmetallic lockable tweezers feature a locking lever for high reliability in 6-in. wafer handling. The M100-150L is optically polished in specific areas so that a wafer can be firmly handled with minimal contact and scratching. The tweezers are offered in several thermoplastic materials that are selected for temperature and chemical resistance, including virgin polyetheretherketone (PEEK), conductive PEEK for ESD-protection, and polyphenylene sulfide.

Heated Chucks

Minco Products

Minneapolis, MN

Thermofoil heated chucks for semiconductor processing equipment are lightweight, compact components for lithography, CVD, PVD, dry etch, and stripping processes. Available in 200- and 300-mm sizes, the chucks improve temperature uniformity. Design options include polyimide insulated heaters bonded to aluminum chucks (to 260°C), mica insulated heaters sealed into welded chucks (to 500°C), and mica insulated heaters clamped between silicone carbide plates (to 600°C). Other options include profiled power for uniform temperature and integral sensors for accurate control. The company offers services for finite element analysis and thermal imaging to optimize thermal performance.

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