Lithography Tool

Ultratech Stepper

San Jose, CA

A new-generation lithography tool is used in air bearing surface (ABS) patterning of thin-film-head rowbar applications. The Model 1900 tool has a theta stage design that provides refined accuracy and increased repeatability. An enhanced machine vision system offers good alignment capability. Resolution lens options of 1.0 and 2.0 µm are offered, which are designed to meet the needs of simple and advanced ABS designs. A touch screen interface and customized hardware and software ease operation.

Compact IC Unit

Metrohm-Peak

Friendswood, TX

The Model 761 ion chromatography unit combines an injection valve, serial dual-piston pump, column, suppressor module, and conductivity detector in one compact unit. Each IC has a flow path that is constructed of PEEK. The pump provides variable flow levels from 0.2 to 2.5 mL/min, while the detector has selectable thermostat temperatures from 25° to 45°C in 5°C steps. Peripherals are kept to a minimum with one PC connection and an on/off switch. Functions are PC-controlled with Windows-based software that includes 180 defined methods for full instrument control. Over 300 additional applications are available for download via the Internet. Each unit is performance tested at the factory prior to shipping.

Arsine Permeation Tubes

Kin-Tek Laboratories

La Marque, TX

Producing proportions of <50 ppb to 5 ppm, the Series 57 arsine permeation tubes deliver verifiable, low-concentration gas standards. Each stainless-steel tube measures 6 x 1.75 in. and contains a permeation membrane. Eliminating the need for high-pressure cylinders that contain large quantities of hazardous materials, the units come filled with <4 g of arsine. The tubes are equipped with a purge kit that enables safe storage. All products are serial numbered and shipped with certification data that the company keeps on file for five years. Permeation tubes are also available for other toxic gases, including phosphine, silane, germane, and boron trifluoride.

Vacuum Inlet Trap

MV Products

North Billerica, MA

A high-capacity vacuum inlet and exhaust trap for collecting solids keeps production lines operating and extends preventive maintenance schedules. The MV Multi-Trap features water-cooled internal coils that have a total surface area of over 200 sq in. Two customizable filtration stages condense and collect heavy particulates in 500 cu in. of storage space. Offered with ISO 80 or ISO 100 flanges, the trap is constructed completely from stainless steel. The filtration stages use five 4.5-in. replaceable elements, commonly made of stainless-steel gauze or micron-rated polypropylene.

Ultrapure Regulator

Saint-Gobain Performance Plastics

Garden Grove, CA

The Furon UPRP precision regulator delivers aggressive pure chemicals and DI water precisely while maintaining downstream pressure to a predetermined set level. The component is used wherever fluid system delivery requires high purity. It is available in either a manually actuated or pneumatically actuated version. It handles fluid temperatures up to 194°F and is made of all-virgin PTFE/Fluoroloy T and PFA wetted flow paths. It features a PTFE isolation bellows that protects system chemistry and, in the pneumatically actuated version, a secondary diaphragm that protects the compressed air system. An optional integral leak detection port is also available. All external surfaces are nonmetallic.

Gas Cell

SensIR Technologies

Danbury, CT

A high-pressure gas cell can be used with the TravelIR Fourier transform–infrared analysis spectrometer and the DuraSampleIR and DuraScope in-compartment FT-IR analysis systems. Capable of testing gases up to 1300 psi, the compact cell has a path length of 10 cm. High pressures allow the unit to take small samples directly from the container and produce high-quality spectral data with a minimum number of scans. Inert to most gases presented for analysis, the cell is built with 316 stainless steel, sapphire windows, and Kalrez O-rings.

Sensor Fitting

Accutech

Hudson, MA

A quick-disconnect sensor fitting eliminates many of the problems associated with removing sensors for calibration. The bayonet-style fitting reduces galled threads and provides tool-free installation. Removal is achieved by opening the transmitter head, disconnecting sensor wires, twisting the fitting to disengage it, and then sliding the sensor out. The unit can be installed in waterproof or explosion-proof heads. Sensors with the fitting can be ordered individually or purchased with a complete measurement system.

Arc Welder

Pro-Fusion Technologies

Newbury Park, CA

Combining a power supply, lathes, positioners, and controllers, a welding station delivers precise, automatic arc welding. The system is suitable for small- and medium-sized components and assemblies, and requires a minimum of operator skill. Accurate weld current and precise rotation improve weld quality and output while reducing scrap and rework. Preground tungsten electrodes to weld small parts are also available.

Oxygen-Deficiency Detector

General Monitors

Lake Forest, CA

An oxygen-deficiency detector senses even small decreases of normal atmospheric oxygen content that can endanger workers. Using electrochemical-cell technology, the TS420 detector identifies deficiencies of 0–25% by volume. The compact unit measures 1.75 x 4.5 in., weighs 8 oz, and has a chemical-
resistant housing. A two-wire loop-powered output signal provides remote alarm and fault indication. Advanced electronics permit adjustment-free calibration, and a liquid-crystal display shows status, fault, and calibration cues. A variety of accessories are available to use with the detector, including a field-mounted display, flow block, and splash guard.

Level Switch

Fluid Components International

San Marcos, CA

The NuTec LS2000 level switch uses two-wire 4–20-mA loop-powered electronics to provide reliability in extreme process conditions. Eliminating expensive instrument conduit runs in explosive environments, the unit is suitable for retrofitting failure-prone switches without changing or adding wires. Operating temperatures range from –40° to 250°F, with pressures of up to 500 psig. Constructed with 316 stainless steel for all wetted surfaces, the switch can be top- or side-mounted. The FM-, CENELEC-, and CSA-approved unit's accuracy level is within ±0.125 in.

High-Purity Hose Assemblies

Integra

Bedford, MA

High-purity hose assemblies operate over a range of temperature extremes and withstand pressures up to 3100 psi. With exteriors made of braided stainless steel, the hoses have optional interior styles that include smooth bore or convoluted PFA, FEP, and PTFE Teflon or convoluted stainless steel. Available sizes include 1/8 to 1 1/2 in. for hoses with Teflon interiors and 1/4 to 4 in. for those using stainless steel. Hose lengths are custom fabricated from a few inches to 300 ft. Termination options include O-ring face seal, butt weld, compression, vacuum, or NPT.

Digital Pressure Gauges

DCT Instruments/Sensotec

Columbus, OH

The JK-series digital pressure test gauges measure pressure ranges of 0–15 to 0–10,000 psi and have a full-scale accuracy of 0.2%. The stainless-steel units capture both high- and low-pressure readings and update three times per second. With no moving parts, the gauge tolerates overpressure and requires little recalibration. An enhanced-resolution 4.5-digit display eliminates parallax and interpolation errors. The gauge offers a variety of field-selectable measurement units, including psi, bar, mbar, kPa, mPa, ft.H^₂O, in.H^₂O, in.Hg, and mmHg (Torr), and provides gauge, absolute, vacuum, or compound references. Batteries or standard power lines can supply power.

Wafer-Analysis Software

ADE

Westwood, MA

A software application analyzes production-related defect problems and monitors process variations using advanced trend identification. Performing timely examinations, Wafer Analyzer 2.2 with camLine SPC software offers real-time process control of functions such as inspection-tool control. The SPC portion of the application executes distributional analyses and allows advanced setup for control charts.

Antistatic Tape

ESD Systems.com

Marlboro, MA

High-visibility yellow antistatic tape withstands temperatures of 10° to 50°C and is suitable for general-purpose applications. The tape is marked with an ESD-susceptible symbol that is approved by Mil Spec, JEDEC, and the ESD Association. The symbols are printed between the film and adhesive so they will not rub off. A rubber-based adhesive absorbs moisture and has a surface resistivity of 10¹⁰ . The tape comes in widths of 1/2, 3/4, 1, or 2 in., and is 2.4 mil thick. Roll length is 72 yd.

Pressure Transducers

Gems Sensors

Plainville, CT

Using thin-film sensing elements to increase stability, Psibar 3000 series pressure transducers drift only 0.06% per six years and are accurate to within ±0.15%. Using high-temperature and kinetically charged gases, the sensing element is fused at the atomic level so that the system's strain gauges are more stable and less sensitive to thermal exposure than their silicon counterparts. The sensors serve pressure applications of 500–10,000 psi and are immune to RFI of up to 30 V/m. Performance is unaffected in temperatures of –55° to 120°F. Stainless-steel construction allows use in rugged environments. A variety of output signals, pressure port sizes, and electrical connections are available.

Modular Cleanroom

Flowstar Cleanrooms

Gilroy, CA

Modular cleanrooms are portable and prefabricated to allow transportation and expansion. Nova series cleanrooms have Class 10 to Class 100,000 ratings and use an all-welded construction suitable for seismic zone 4. Walls are constructed of Vinylshield, Plexiglas, or melamine. Air-handling options include a sidewall mechanical recirculation system or single-pass self-powered HEPA filters. House HVAC can perform air-conditioning. An entry vestibule with air curtains and outfitting equipment are also available.

Shoe Cleaner

Liberty Industries

East Berlin, CT

The fully automated Model 2001-TB shoe cleaner uses four motor-driven brushes to remove contamination from most types of footwear. A weight-loaded top brush fits the contour of upper shoe surfaces, including shoelaces. Measuring 19 x 15 1/4 x 39 in., the unit is powered by a low-rpm 1/6-hp electric gearmotor. Controls are located on the top of a support arm that helps maintain operator balance. The cover is made of white polyethylene and has a removable hood that is secured by four latches. The cleaner can be used in conjunction with a vacuum system.

Leak Detectors

Ulvac Technologies

Methuen, MA

The Heliot 100 line of portable, dry helium leak-detection units provides the sensitivity of a large, console-size helium testing system in a small, portable package, reducing testing time and increasing productivity. The system uses a dry backing pump instead of the traditional oil-sealed rotary vacuum pump. This dry process eliminates such wet-testing techniques as immersion in water or soap bubble besting. Because the atmosphere contains approximately 5 ppm of helium, tracer quantities of helium gas passing through leaks are quickly detected by the unit's mass spectrometry capability. Weighing 32 lb, the detector is equipped with touch screen control and has automated features that enable reliable, high-sensitivity leak testing on large and small objects, such as vacuum process chambers, valves, pumps, heat exchangers, tanks, and piping and tubing assemblies.

200-, 300-mm Etch Tools

Lam Research

Fremont, CA

The 2300 etch series enables users to scale from 200- to 300-mm manufacturing. The tools support all etch applications for sub-130-nm technology nodes and combine extendable technologies for etching new materials and structures. The small-footprint, open-architecture platform handles four process modules for factory and process automation. The Web-capable software facilitates communication from remote locations, supporting shared development and troubleshooting. The Exelan Dielectric 2300 etch system uses dual-frequency confined plasma techology, which is used in volume production in copper damascene, low-k, spacer, contact, via, and in situ hardmask applications. The Versys Silicon 2300 etch system performs in situ waferless auto cleans, enabling high mean times between wet cleans and high yields. The Versys Metal 2300 etch system handles aluminum etch and integrated resist removal. The system's modular design allows users to shift from aluminum to copper processes.

Control Ball Valve

George Fischer

Tustin, CA

The Type 110 control ball valve allows a gradual increase in flow rather than the sudden increase typically associated with ball valves. Combining the strengths of linear flow output and the ball design of the Type 346 valve, the Type 110 offers a cost-effective alternative for a variety of situations. The valve's molded, all-plastic construction provides excellent chemical resistance for aggressive-media applications; it requires little maintenance and has a long working life. Available in PVC, PP, and PVDF and in 1/2- to 2-in. sizes, the valve offers high Cv values and small presure loss in the open position. It features control angles from 9° to 90° for maximum control flexibility. Manual, electric, and pneumatically actuated versions with socket and butt-fusion spigot end connections suit virtually any piping system.

Defect Data–Analysis Software

iSemicon

Taejon, South Korea

Defecter II data-analysis software provides information on the exact number of failed chips by defects. In addition, the software enables users to analyze the maximum number of yield-losing chips by defects (potential risk), the defect management level, the effects of different defect types, and the rate of failed chips on EDS. For example, the software can determine the highest yield-killing process by defect and how many chips will be affected by that process. It can also classify the 300 fabrication processes according to the degree of yield loss and record the number of failed chips by defect from each process.

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