INDUSTRY NEWS

What's Going On

February 25–March 2, SPIE's International Symposium on Microlithography; Santa Clara, CA. Contact: 360/676-3290; pw@spie.org.

February 26–March 1, Semiconductor Pure Water and Chemicals Conference (SPWCC); Monterey, CA. Contact: 408/745-0600.

March 4–6, Dielectrics for ULSI Multilevel Interconnection Conference (DUMIC); Santa Clara, CA. Contact: 813/978-3552.

March 5–9, Semiconductor Technology Seminar; Orlando, FL. Contact: 256/536-1304; clay@cti-us.com.

March 8–9, CMP for ULSI Multilevel Interconnection Conference (CMP-MIC); Santa Clara, CA. Contact: 813/978-3552.

March 12–14, Chemical Engineering for Nonchemical Engineers; Houston. Contact: 800/462-0876; custserv@epd.engr.wisc.edu.

March 25–30, The Electrochemical Society Meeting; Washington, DC. Contact: 609/737-1902.

March 27, ABCs of IC Design and Fabrication; Seoul. Contact: 636/343-1333; heather@pti-inc.com.

March 28, Fundamentals of CMP; San Jose. Contact: 636/343-1333; heather@pti-inc.com.

March 28–29, Semicon China; Beijing. Contact: 408/943-6997; ljarman@semi.org.

April 2–4, Ultrapure Water Expo 2001; Philadelphia. Contact: 303/973-6700; water@talloaks.com.

April 4–5, Understanding and Using eSupply Chains; Detroit. Contact: 800/733-4763.

April 10–11, Northeast Regional Meeting on Optoelectronics, Photonics, and Imaging; Rochester, NY. Contact: 360/676-3290; spie@spie.org.

April 10–13, Semiconductor Safety Association Annual Conference and Exhibition; New Orleans. Contact: 703/790-1745.

April 21–26, SVC TechCon; Philadelphia. Contact: 505/856-7188; svcinfo@svc.org.

April 22–25, ESTECH 2001, Technical Meeting of IEST; Phoenix. Contact: 847/255-1561; iest@iest.org.

April 23–24, IEEE/SEMI ASMC; Munich. Contact: 202/289-0440, mkindling@semi.org; +32 2 2896496, europrogram@semi.org.

April 24–26, Semicon Europa 2001; Munich. Contact: 408/943-7936, djuarez@semi.org (United States); +32 2 2896493, kstuckey@semi.org (Europe).

April 25–26, Adept Robotics Conference 2001; Monterey, CA. Contact: http://www.adept.com/intconf.html.

May 7–11, Failure and Yield Analysis Course; Glasgow, Scotland. Contact: 505/299-1967; mstriz@analyticalsol.com.

May 13–15, International Symposium on Plasma- and Process-Induced Damage; Monterey, CA. Contact: 408/246-3600; della@vacuum.org.

May 21–23, SCP Global Technologies' International Symposium and Technical Exhibition; Boise, ID. Contact: 208/378-7261; jdoster@scpglobal.com

May 23–24, Manufacturing Execution Systems: Software Technology for Forecasting, Scheduling, and Planning; Detroit. Contact: 800/733-4763.

May 30–June 1, SPIE's International Symposium on Microelectronic and MEMS Technologies. Contact: 360/676-3290; spie@spie.org.

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