Product Extra!

FSI International's new platform for the ZETA system is 30% smaller than earlier versions of the surface conditioning tool and more than 40% smaller than batch immersion systems. Models 200FE and 300FE are designed for front-end-of-line processing, while models 200BE and 300BE are used for back-end-of-line applications. Both lines are automated for use with 200- and 300-mm wafers. They can also be loaded manually for 200-mm semiautomated systems. FSI has entered the BEOL market with the back-end systems, which are new configurations of the ZETA platform. Info: http://www.fsiintl.com.

Advanced Energy Industries has published a white paper titled Redundant Anode Sputtering: A Novel Approach to the Disappearing Anode Problem. The publication describes a method of sputtering an insulating material using a single target with a surface that is free of unwanted charges and arcing problems. The system uses an AC power supply and an anode-and-circuit configuration to avoid a "disappearing anode" effect. The plasma itself acts as a rectifier to convert the alternating power to dc power for the single cathode. Info: http://www.advanced-energy.com.

The PSK-310 kit from Prostat has complete instrumentation for taking measurements and conducting ESD audits that conform to the ANSI/ESD S20.20 static control standard. Instruments in the kit include a field meter, static decay timer, resistance meter, charge-plate assembly, and concentric ring fixture. Accessories permit users to measure resistance, volume resistivity, surface resistivity, electrostatic fields, charge generation, and ionizer performance. The kit comes in a molded carrying case with a retractable handle and wheels. Info: http://www.prostatcorp.com.

DataTOC from Anatel is a software program for the A-2000 analyzer that creates a sample identification table and automatically calculates TOC results. Results include averages, standard deviations, and percent RSD. The program can be used for compliance monitoring in a range of manufacturing settings. Info: 800/373-0531.

Ausimont has established a Web site containing extensive information on the company's line of fluorochemicals for semiconductor manufacturing and other industrial uses. Hyperlinks at the site offer detailed information on the fluorochemistry technology used by the company, new products, industry news, and trade association news. The site also features a form for submitting technical questions. Ausimont's product line includes Halar ECTFE, Hylar 5000 PVDF, Algoflon PTFE, and Hyflon PFA. Info: http://www.ausimont.com

Product literature from 3M highlights the specifications and capabilities of the company's specialty gas PFG-3480 and its Novel engineered fluid HFE-7500. Made for cleaning CVD chambers, the specialty gas can reduce PFC emissions by 90% over C^₂F^₆ and can reduce operating costs by up to 66% by lowering gas consumption. Designed to enhance equipment reliability, the Novel engineered dielectric fluid has low global-warming potential. Info: http://www.3M.com.

Free software from Wright Williams & Kelly enables users to enter data from International Sematech's cost-resource model and convert the data into the WWK Factory Commander format. The format facilitates evaluation of financial viability, equipment capacity, product cost, and factory-wide resource needs. The new program gives operators a rapid method for translating modeling inputs without risking the omission of data or misrepresentation of key modeling aspects. Info: http://www.wwk.com.

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