Product Extra!

Semitool will integrate a metal-film metrology system from Philips Analytical in its line of copper electrochemical deposition (ECD) tools. The metrology system can be used for inspecting the quality of incoming copper seed layers and the copper ECD layer. This feature optimizes ECD process feedback to ensure a uniform plated layer. The integrated metrology function enables users to track variations in the quality of the copper seed layers in order to ensure a high level of process control and improve yield. Information: 508/647-1145 (Philips); 406/752-2107.

Simulation software vendor Fluent and plasma modeling company Kinema Research & Software will develop a computer-aided engineering tool for plasma simulation. The simulation tool will help engineers design equipment and processes, as well as reduce both development time and cost. Applications include plasma-enhanced CVD, dielectric and metal etching, ion implantation, and reactor cleaning. Fluent will provide sales, marketing, and technical support. The product will incorporate Kinema's plasma chemistry database with chemistry models for key uses. Information: 603/643-2600.

Eastman Chemical has upgraded testing of its solvents to measure triple the number of trace metals in the chemicals. The work is carried out in a new Class 1000 testing facility. The room houses an inductively coupled plasma-mass spectrometer with a detection capability in the range below parts per billion, a particle counter with autoflow chemical sampler, and a microwave digestion/sample preparation system for detecting ultratrace contamination levels. The supplier is conducting the tests on EastaPure PM acetate, EastaPure MPK, EastaPure MAK, and EastaPure n-butyl acetate. Testing on ethyl acetate and acetic acid will follow. Information: 423/229-3078.

Kinetico is offering three levels of wastewater treatment for gallium arsenide saw and grinder water uses. The three levels are (1) meeting only compliance levels without recycling or recovery; (2) water recycling with no gallium arsenide recovery and an option for zero discharge to sewer lines; and (3) water recycling, gallium arsenide recovery, and an option for zero discharge to sewer lines. All three options remove suspended solids with the supplier's EPOC microfiltration system. The system separately recovers the solids removed by the microfilter and the batch-treated DI system regenerations. This capability recovers the majority of gallium arsenide solids in a highly pure form. Information: 800/633-5530.

General Chemical's electronic chemicals business has commissioned two stainless-steel trailers for bulk delivery of ultrahigh-purity sulfuric acid and nitric acid. The Teflon-lined trailers ensure that customers receive clean off-loaded products at their bulk chemical distribution centers. The trailers will be used to distribute the supplier's Class 1 and Trillium-grade products in the United States. Information: 925/458-7359.

Electro-Graph will use Poco Graphite's advanced graphite material for its ion implantation components. The PyroGraph material is a graphite infiltrated with pryolytic carbon. It is designed to generate fewer particles than implantation components made with materials such as glassy carbons, quartz, graphites, and aluminum. The infiltration increases the density of the material to create a hard surface that resists wear. Information: 760/438-9090.

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