Product Extra!

KLA-Tencor's iSupport gives the company's technical support crew remote access to data from tools installed at customers' fabs. The on-line support feature enables KLA-Tencor to diagnose and solve equipment problems in real time. The system is designed to continuously monitor and report on tools. It also alerts clients to potential problems through an automated early detection system. The goal is to help customers maximize equipment uptime and lower the cost of ownership for the company's line of yield-management and process control equipment. The vendor transfers data collected from iSupport into an integrated diagnostic monitoring server installed at the fab. The server monitors tools connected to the on-line service. A gatekeeper function prohibits unauthorized access to the tool. If spare parts are needed, the service determines which part of the system needs repairing before an engineer is sent to the site.

A lithography platform from Silicon Valley Group is designed for making next-generation chips on 200- and 300-mm wafers. The platform supports critical and noncritical lithography at 248-, 193-, and 157-nm wavelengths. The 300-mm version has the same footprint as the company's line of 200-mm tools. The platform converts from 200- to 300-mm production with a single shift conversion. Capable of supporting a variety of optical trains, the system can be used across device generations.

The 200-mm reticle SMIF-Pod from Asyst Technologies is a sealed container that maintains reticles in a Class 1 or better environment. The pod is designed to minimize yield loss caused by reticle contamination or mishandling. It is compatible with the supplier's 200-mm SMIF I/O LoadPorts for automated loading onto lithography systems. This feature minimizes the chance of reticle damage from either particle contamination or ESD. The component's edge-to-edge chamber reticle contact reduces reticle movement inside the pod during transport and shipment. The pod handles, transports, and stores 6- and 9-in. reticles both inside and outside the mask shop.

ThermoMicroscopes's revised and updated Practical Guide to Scanning Probe Microscopy is available as a CD-ROM format. The guide's summary of SPM technology includes scanning modes, scanner linearity, probe cantilevers, probe tips, and image interpretation. The CD-ROM offers fast search capabilities and hyperlinks.

Newport's on-line shopping cart forwarding system adds flexibility to processing orders for the vendor's product line. Customers may forward a shopping cart to their company's purchasing agent, send the cart to a home computer from work or send the cart from home to work. It can also be sent to another user.

A six-page technical bulletin from Magnatex Pumps describes a line of PFA-lined Texel MTA series pumps. The bulletin includes product features, benefits, dimensional drawings, materials of construction, and performance data. An interchangeability chart is also featured. The pump's PFA fluoropolymer lining makes it corrosion resistant for use with mineral and organic acids as well as bases, alcohols, hydrocarbons, and halogens. The sealless magnetic drive is designed for leak-free operation. Flow rates are 320 gal/min, and working pressure is 150 psi max.

ATMI's subatmospheric gas storage and delivery products have been specified by Factory Mutual Engineering as the preferred method to safely store and deliver dopant gases for semiconductor manufacturing. The product line includes SDS and SAGE proprietary gas sources. Factory Mutual specializes in property loss prevention through scientific research, third-party product testing, and the development of engineering guidelines. The supplier's products are used in ion implanters and CVD tools.

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